| 序号 | 命令 | 功能名（符号） | 方向 |
| 1 | S1F1 | Are You There Request® | 设备<->主机 |
| 2 | S1F2 | On Line Data (D) | 设备<->主机 |
| 3 | S1F3 | Selected Equipment Status Request (SSR) | 主机->设备 |
| 4 | S1F4 | Selected Equipment Status Data (SSD) | 设备->主机 |
| 5 | S1F11 | Status Variable Namelist Request (SVNR) | 主机->设备 |
| 6 | S1F12 | Status Variable Namelist Reply (SVNRR) | 设备->主机 |
| 7 | S1F13 | Establish Communication Request (CR) | 设备<->主机 |
| 8 | S1F14 | Establish Communication Acknowledge (CRA) | 设备<->主机 |
| 9 | S1F15 | Request OFF-LINE (ROFL) | 主机->设备 |
| 10 | S1F16 | OFF-LINE Acknowledge (OFLA) | 设备<->主机 |
| 11 | S1F17 | Request ON-LINE (RONL) | 主机->设备 |
| 12 | S1F18 | ON-LINE Acknowledge (ONLA) | 设备<->主机 |
| 13 | S2F13 | Equipment Constant Request (ECR) | 主机->设备 |
| 14 | S2F14 | Equipment Constant Data (ECD) | 设备->主机 |
| 15 | S2F15 | New Equipment Constant Send (ECS) | 主机->设备 |
| 16 | S2F16 | New Equipment Constant Acknowledge (ECA) | 设备->主机 |
| 17 | S2F17 | Date and Time Request (DTR) | 设备<->主机 |
| 18 | S2F18 | Date and Time Data (DTD) | 设备<->主机 |
| 19 | S2F23 | Trace Initialize Send (TIS) | 主机->设备 |
| 20 | S2F24 | Trace Initialize Acknowledge (TIA) | 设备->主机 |
| 21 | S2F29 | Equipment Constant Namelist Request (ECNR) | 主机->设备 |
| 22 | S2F30 | Equipment Constant Namelist (ECN) | 设备->主机 |
| 23 | S2F31 | Date and Time Set Request (DTS) | 主机->设备 |
| 24 | S2F32 | Date and Time Set Acknowledge (DTA) | 设备->主机 |
| 25 | S2F33 | Define Report (DR) | 主机->设备 |
| 26 | S2F34 | Define Report Acknowledge (DRA) | 设备->主机 |
| 27 | S2F35 | Link Event Report (LER) | 主机->设备 |
| 28 | S2F36 | Link Event Report Acknowledge (LERA) | 设备->主机 |
| 29 | S2F37 | Enable/Disable Event Report (EDER) | 主机->设备 |
| 30 | S2F38 | Enable/Disable Event Report (EERA) | 设备->主机 |
| 31 | S2F41 | Host Command Send (HCS) | 主机->设备 |
| 32 | S2F42 | Host Command Acknowledge (HCA) | 设备->主机 |
| 33 | S2F49 | Enhanced Remote Command | 主机->设备 |
| 34 | S2F50 | Enhanced Remote Command Acknowledge | 设备->主机 |
| 35 | S5F1 | Alarm Report Send (ARS) | 设备->主机 |
| 36 | S5F2 | Alarm Report Acknowledge (ARA) | 主机->设备 |
| 37 | S5F3 | Enable/Disable Alarm Send (EAS) | 主机->设备 |
| 38 | S5F4 | Enable/Disable Alarm Acknowledge (EAA) | 主机->设备 |
| 39 | S5F5 | List Alarms Request (LAR) | 主机->设备 |
| 40 | S5F6 | List Alarm Data (LAD) | 设备->主机 |
| 41 | S5F7 | List Enabled Alarm Request (LEAR) | 主机->设备 |
| 42 | S5F8 | List Enabled Alarm Data (LEAD) | 设备->主机 |
| 43 | S6F1 | Trace Data Send (TDS) | 设备->主机 |
| 44 | S6F2 | Trace Data Acknowledge (TDA) | 主机->设备 |
| 45 | S6F11 | Event Report Send (ERS) | 设备->主机 |
| 46 | S6F12 | Event Report Acknowledge (ERA) | 主机->设备 |
| 47 | S6F15 | Event Report Request (ERR) | 主机->设备 |
| 48 | S6F16 | Event Report Data (ERD) | 设备->主机 |
| 49 | S6F19 | Individual Report Request (IRR) | 主机->设备 |
| 50 | S6F20 | Individual Report Data (IRD) | 设备->主机 |
| 51 | S7F1 | Process Program Load Inquire(PPI) | 主机<->设备 |
| 52 | S7F2 | Process Program Load Grant(PPG) | 设备<->主机 |
| 53 | S7F5 | Process Program Request(PPR) | 主机<->设备 |
| 54 | S7F6 | Process Program Data(PPD) | 设备<->主机 |
| 55 | S7F17 | Delete Process Program Send(DPS) | 主机->设备 |
| 56 | S7F18 | Delete Process Program Acknowledge(DPA) | 设备->主机 |
| 57 | S7F19 | Current EPPD Request(RER) | 主机->设备 |
| 58 | S7F20 | Current EPPD Data(RED) | 设备->主机 |
| 59 | S7F25 | Formatted Process Program Request(FPR) | 主机<->设备 |
| 60 | S7F26 | Formatted Process Program Data(FPD) | 设备<->主机 |
| 61 | S10F1 | Terminal Request (TRN) | 设备->主机 |
| 62 | S10F2 | Terminal Request Acknowledge (TRA) | 主机->设备 |
| 63 | S10F3 | Terminal Display, Single (VTN) | 主机->设备 |
| 64 | S10F4 | Terminal Display, Single Acknowledge (VTA) | 设备->主机 |
| 65 | S10F9 | Broadcast (BCN) | 主机->设备 |
| 66 | S10F10 | Broadcast Acknowledge (BCA) | 设备->主机 |
GEM200针对8吋晶圆，GEM300针对12吋晶圆